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検索キーワード:(件名: #Plasma etching)
該当件数:4件
Glow discharge processes : sputtering and plasma etching / Brian Chapman
est.. - New York : Wiley , 1980. - (A Wiley-Interscience publication)
図書
Plasma etching in semiconductor fabrication / Russ A. Morgan
Amsterdam ; Tokyo : Elsevier , c1985. - (Plasma technology ; 1)
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
2nd ed. - Hoboken, N.J. : Wiley-Interscience , c2005
Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
Washington, D.C. : The American Chemical Society , 1983. - (ACS symposium series ; 219)