京都工芸繊維大学を検索します。
CiNii Researchを検索します。
CiNii Booksを検索します。
NDLサーチを検索します。
IRDBを検索します。
検索キーワード:(件名: #Microlithography)
該当件数:6件
Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau
New York : Plenum Press , c1988. - (Microdevices : physics and fabrication technologies)
図書
Micromachining and microfabrication
: us,: uk. - Bellingham, Wash. : SPIE Optical Engineering Press. - London : Institution of Electrical Engineers , c1997. - (IEE materials & devices series ; 12B . Handbook of microlithography, micromachining and microfabrication / P. Rai-Choudhury, editor ; v. 2)
Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao
Boston ; Tokyo : Academic Press , c1989
Electronic and photonic applications of polymers / Murrae J. Bowden, editor, S. Richard Turner, editor
Washington, DC : American Chemical Society , 1988. - (Advances in chemistry series ; 218)
Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
Washington, D.C. : The American Chemical Society , 1983. - (ACS symposium series ; 219)
Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
Washington, D.C. : The Society , 1984. - (ACS symposium series ; 266)