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Search keyword:(Subject: #Microelectromechanical systems)
Results:6items
Understanding MEMS : principles and applications / Luis Castañer
Chichester : Wiley , 2016
Books
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya
Oxford, UK ; Waltham, MA : William Andrew , c2015. - (Micro & nano technologies)
Microsystem design / Stephen D. Senturia
Boston : Kluwer Academic Publishers , c2001
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou
: hardback. - 3rd ed. - Boca Raton : CRC Press , c2012. - (Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; v. 1)
Microfluidics based microsystems : fundamentals and applications / edited by S. Kakaç ... [et al.]
pbk.,hbk.. - Dordrecht : Springer , c2010. - (NATO science for peace and security series ; Ser. A . Chemistry and biology)
Introduction to microfabrication / Sami Franssila
: cloth. - 2nd ed. - Chichester, West Sussex, England : Wiley , 2010