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Microsystem design / Stephen D. Senturia
Boston : Kluwer Academic Publishers , c2001
Books
Understanding MEMS : principles and applications / Luis Castañer
Chichester : Wiley , 2016
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou
: hardback. - 3rd ed. - Boca Raton : CRC Press , c2012. - (Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; v. 1)
Introduction to microfabrication / Sami Franssila
: cloth. - 2nd ed. - Chichester, West Sussex, England : Wiley , 2010