Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
| データ種別 | 雑誌 |
|---|---|
| 出版者 | New York : American Institute of Physics |
| 出版年 | 1991- |
| 本文言語 | 英語 |
| 大きさ | v. : ill. ; 29 cm |
書誌詳細を非表示
| 変遷注記 | 継続前誌:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society |
|---|---|
| 書誌ID | ZY00002886 |
| ISSN | 10711023 |
| NCID | AA10804928 |
