Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
(ACS symposium series ; 219)
| データ種別 | 図書 |
|---|---|
| 出版者 | Washington, D.C. : The American Chemical Society |
| 出版年 | 1983 |
| 本文言語 | 英語 |
| 大きさ | ix, 363 p. : ill. ; 24 cm |
所蔵情報を非表示
| 配架場所 | 巻 次 | 請求記号 | 資料番号 | 状 態 | コメント | ISBN | 予約 | 指定図書グループ |
|---|---|---|---|---|---|---|---|---|
| 2F図書 (自然科学・技術・産業・芸術) |
|
749.5||I | 9852303460 |
|
|
|
書誌詳細を非表示
| 内容注記 | An introduction to lithography / L.F. Thompson The lithographic process The physics / L.F. Thompson and M.J. Bowden Organic resist materials Theory and chemistry / C. Grant Willson Resist processing / L.F. Thompson and M.J. Bowden Plasma etching / J.A. Mucha and D.W. Hess Multi-layer resist systems / B.J. Lin |
|---|---|
| 一般注記 | Includes bibliographical references and index |
| 著者標目 | Thompson, L. F., 1944- Willson, C. G. (C. Grant), 1939- Bowden, M. J., 1943- American Chemical Society. Division of Polymeric Materials : Science and Engineering American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.) |
| 分 類 | LCC:TR940 DC19:686.2/315 NDLC:PE31 |
| 件 名 | LCSH:Microlithography -- Congresses
全ての件名で検索
LCSH:Photoresists -- Congresses 全ての件名で検索 LCSH:Plasma etching -- Congresses 全ての件名で検索 |
| 書誌ID | TY20016239 |
| NCID | BA04572087 |
