Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
(ACS symposium series ; 266)
| データ種別 | 図書 |
|---|---|
| 出版者 | Washington, D.C. : The Society |
| 出版年 | 1984 |
| 大きさ | viii, 494 p. : ill. ; 24 cm |
所蔵情報を非表示
| 配架場所 | 巻 次 | 請求記号 | 資料番号 | 状 態 | コメント | ISBN | 予約 | 指定図書グループ |
|---|---|---|---|---|---|---|---|---|
| 2F図書 (自然科学・技術・産業・芸術) |
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549.8||M11 | 9852408694 |
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| 積層4層 |
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549.8||M11||(B) | 9852410620 |
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書誌詳細を非表示
| 別書名 | 異なりアクセスタイトル:Radiation-sensitive polymers |
|---|---|
| 一般注記 | Includes bibliographies and indexes |
| 著者標目 | Thompson, L. F., 1944- Willson, C. G. (C. Grant), 1939- Fréchet, J. M. J. American Chemical Society. Division of Polymeric Materials : Science and Engineering American Chemical Society. Division of Polymer Chemistry American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.) |
| 分 類 | LCC:TK7871.15.P6 DC19:621.381/73 |
| 件 名 | LCSH:Polymers and polymerization -- Congresses
全ての件名で検索
LCSH:Photoresists -- Congresses 全ての件名で検索 LCSH:Microlithography -- Materials -- Congresses 全ての件名で検索 LCSH:Microelectronics -- Materials -- Congresses 全ての件名で検索 |
| 書誌ID | TY20016115 |
| NCID | BA03230678 |
