Introduction to microfabrication / Sami Franssila
| Material Type | Books |
|---|---|
| Edition | 2nd ed |
| Publisher | Chichester, West Sussex, England : Wiley |
| Year | 2010 |
| Language | English |
| Size | xiv, 518 p. : ill. ; 26 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | ISBN | Reserve | Designated Book |
|---|---|---|---|---|---|---|---|---|
| 1Fシラバス掲載図書 | : cloth | 549.7||F44 | 9300392228 |
|
9780470749838 | シラバス2024年度 |
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| Notes | Includes bibliographical references and index |
|---|---|
| Authors | *Franssila, Sami |
| Classification | LCC:TK7875 DC22:621.3 DC22:621.381 NDLC:ND351 |
| Subjects | LCSH:Microelectromechanical systems LCSH:Electronic apparatus and appliances LCSH:Microfabrication LCSH:Integrated circuits LCSH:Semiconductor processing LCSH:Nanotechnology |
| ID | BB00096203 |
| ISBN | 9780470749838 |
| NCID | BB05513331 |
