From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications / Marc J. Madou
(Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; v. 3)
| Material Type | Books |
|---|---|
| Edition | 3rd ed |
| Publisher | Boca Raton : CRC Press |
| Year | c2012 |
| Language | English |
| Size | xiii, 636 p. : ill. (some col.), ports. ; 29 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | ISBN | Reserve | Designated Book |
|---|---|---|---|---|---|---|---|---|
| 1Fシラバス掲載図書 | : hardback | 549||Ma25||3(B) | 9300390842 |
|
9781420055160 | シラバス2024年度 | ||
| 2F図書 (自然科学・技術・産業・芸術) | : hardback | 549||Ma25||3 | 9300167590 |
|
9781420055160 |
|
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| Notes | Includes bibliographical references and index "This third edition of Fundamentals of microfabrication"--P. [v] |
|---|---|
| Authors | *Madou, Marc J. |
| Classification | LCC:TP248.25.B54 DC22:621.381 |
| Subjects | LCSH:BioMEMS LCSH:Nanoelectromechanical systems LCSH:Nanotechnology LCSH:Biotechnology |
| ID | BB00081139 |
| ISBN | 9781420055160 |
| NCID | BB06583387 |
