Manufacturing techniques for microfabrication and nanotechnology / Marc J. Madou
(Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; v. 2)
| Material Type | Books |
|---|---|
| Edition | 3rd ed |
| Publisher | Boca Raton : CRC Press |
| Year | c2012 |
| Language | English |
| Size | xiii, 656 p. : ill. (some col.), ports. ; 29 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | ISBN | Reserve | Designated Book |
|---|---|---|---|---|---|---|---|---|
| 1Fシラバス掲載図書 | : hardback | 549||Ma25||2 | 9300167588 |
|
9781420055191 | シラバス2024年度 |
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| Notes | Includes bibliographical references and index |
|---|---|
| Authors | *Madou, Marc J. |
| Classification | LCC:TJ1191.5 DC22:620.5 |
| Subjects | LCSH:Microfabrication LCSH:Nanotechnology |
| ID | BB00081138 |
| ISBN | 9781420055191 |
| NCID | BB06582861 |
