Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou
(Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; v. 1)
Material Type | Books |
---|---|
Edition | 3rd ed |
Publisher | Boca Raton : CRC Press |
Year | c2012 |
Language | English |
Size | xiii, 641 p. : ill. (some col.), ports. (some col.) ; 29 cm |
Hide book details.
Location | Volume | Call No. | Barcode No. | Status | Comments | ISBN | Reserve | Designated Book |
---|---|---|---|---|---|---|---|---|
1Fシラバス掲載図書 | : hardback | 549||Ma25||1 | 9300167577 |
|
9781420055115 | シラバス2024年度 |
Hide details.
Notes | Includes bibliographical references and index |
---|---|
Authors | *Madou, Marc J. |
Classification | LCC:TK7875 DC22:621.381 |
Subjects | LCSH:Microelectromechanical systems LCSH:Nanoelectromechanical systems LCSH:Microfluidics LCSH:Solid state physics |
ID | BB00081137 |
ISBN | 9781420055115 |
NCID | BB06582453 |