Fundamentals of microfabrication and nanotechnology / Marc J. Madou
| Material Type | Books |
|---|---|
| Edition | 3rd ed |
| Publisher | Boca Raton : CRC Press |
| Year | c2012 |
| Language | und |
| Size | 3 v. ; 29 cm |
Hide subdivided bibliography.
| 1 | v. 1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012 |
| 2 | v. 2 Manufacturing techniques for microfabrication and nanotechnology / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012 |
| 3 | v. 3 From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012 |
Hide details.
| Authors | Madou, Marc J. |
|---|---|
| ID | BB00081136 |
| NCID | BB06582045 |
