Microsystem design / Stephen D. Senturia
| Material Type | Books |
|---|---|
| Publisher | Boston : Kluwer Academic Publishers |
| Year | c2001 |
| Language | English |
| Size | xxvi, 689 p. : ill. ; 24 cm |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | ISBN | Reserve | Designated Book |
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| 1Fシラバス掲載図書 |
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549||Se74 | 9051200157 |
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シラバス2024年度 | ||
| 2F図書 (自然科学・技術・産業・芸術) |
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549||Se74 | 9200427661 |
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| 積層4層 |
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549||Se74 | 9051200146 |
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| 積層4層 |
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549||Se74 | 9051200168 |
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| Notes | Includes index Bibliography: p.[665]-676 |
|---|---|
| Authors | *Senturia, Stephen D., 1940- |
| Classification | LCC:TK7875 DC21:621.381 |
| Subjects | LCSH:Microelectromechanical systems -- Design and construction
All Subject Search
LCSH:System design LCSH:Microelectronics |
| ID | BB00036430 |
| ISBN | 0792372468 |
| NCID | BA50267345 |
