Fundamentals of microfabrication and nanotechnology / Marc J. Madou
| データ種別 | 図書 |
|---|---|
| 版 | 3rd ed |
| 出版者 | Boca Raton : CRC Press |
| 出版年 | c2012 |
| 本文言語 | und |
| 大きさ | 3 v. ; 29 cm |
子書誌情報を非表示
| 1 | v. 1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012 |
| 2 | v. 2 Manufacturing techniques for microfabrication and nanotechnology / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012 |
| 3 | v. 3 From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012 |
書誌詳細を非表示
| 著者標目 | Madou, Marc J. |
|---|---|
| 書誌ID | BB00081136 |
| NCID | BB06582045 |
