Higashi, Gregg S.
著者名典拠詳細を表示
| 著者の属性 | 個人 |
|---|---|
| 一般注記 | Laser and particle-beam chemical ... c1988: CIP t.p. (Gregg S. Higashi, AT&T Bell Labs., Murray Hill, N.J.) |
| コード類 | 典拠ID=AU20071191 NCID=DA02894271 |
| 1 | Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko Pittsburgh, Pa. : Materials Research Society , c1988 |