Ehrlich, Daniel J.
著者名典拠詳細を表示
| 著者の属性 | 個人 |
|---|---|
| 一般注記 | Laser-controlled chemical processing of surfaces, c1984: CIP t.p. (Daniel J. Ehrlich; Mass. Inst. of Tech.-Lincoln Laboratory, Lexington, Mass.) |
| コード類 | 典拠ID=AU20071190 NCID=DA01101670 |
| 1 | Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao Boston ; Tokyo : Academic Press , c1989 |
| 2 | Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko Pittsburgh, Pa. : Materials Research Society , c1988 |