Tsao, Jeffrey Y.
著者名典拠詳細を表示
| 著者の属性 | 個人 |
|---|---|
| 一般注記 | Lasers in microlithography, c1987: label on cover (Jeffrey Y. Tsao) p. v (Sandia National Lab.) Laser microfabrication, c1989: CIP t.p. (Jeffrey Y. Tsao) data sheet (b. 5/27/55) |
| コード類 | 典拠ID=AU20072607 NCID=DA03657930 |
| 1 | Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao Boston ; Tokyo : Academic Press , c1989 |