Moreau, Wayne M.
著者名典拠詳細を表示
| 著者の属性 | 個人 |
|---|---|
| 一般注記 | His Semiconductor lithography, c1987: CIP t.p. (Wayne M. Moreau, IBM, Hopewell Junction, NY) |
| コード類 | 典拠ID=AU20069270 NCID=DA02187718 |
| 1 | Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau New York : Plenum Press , c1988 |