Madou, Marc J.

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Notes His Chemical sensing with solid state devices, c1988: CIP t.p. (Marc J. Madou, SRI International Physical Electronics Laboratory, Menlo Park, Calif.)
Codes AuthorityID=AU20022606  NCID=DA0355770X
1 Fundamentals of microfabrication and nanotechnology / Marc J. Madou 3rd ed. - Boca Raton : CRC Press , c2012
2 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012
3 Manufacturing techniques for microfabrication and nanotechnology / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012
4 From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications / Marc J. Madou : hardback. - 3rd ed. - Boca Raton : CRC Press , c2012
5 Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou 2nd ed. - Boca Raton, Fla. : CRC Press , c2002